About: http://webisa.webdatacommons.org/147877655

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The liquid crystal display device according to claim 17, wherein the inorganic insulating film is a silicon nitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com