About: http://webisa.webdatacommons.org/147929124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gap 76 between the bottom surface 50 of the top plate 21 and the top surface 48 of the top electrode 40 preferably has a height of about 25 ??m to about 150 ??m, such as about 50 ??m to about 100 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com