PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The present invention relates to a fabrication technique for fabricating a semiconductor device and more particularly to a technique effective for a fabrication of a semiconductor device having a gate electrode at low resistance and capable of enduring a high temperature heat treatment.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com.au