About: http://webisa.webdatacommons.org/14799720

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the prior art, such a diffusion was a defect to increase contact resistance.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com