About: http://webisa.webdatacommons.org/148060730

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A beam such as shown in FIGS. 3A and 3B may be fabricated using semiconductor fabrication and MEMS fabrication processes as will be appreciated by those of ordinary skill in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk