About: http://webisa.webdatacommons.org/148596922

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, lightly doped source/drain (LDD) regions 42 are formed, preferably by implanting a p-type impurity, such as boron, into semiconductor substrate 20.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com