About: http://webisa.webdatacommons.org/148762818

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to FIGS. 4 and 5A???5L, a method 150 is illustrated in FIG. 4 for fabricating semiconductor devices beginning at 152, including gate stack conditioning and encapsulation techniques in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr