About: http://webisa.webdatacommons.org/148786140

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposition and etching processes may be accomplished by various techniques, including various chemical vapor deposition (CVD) processes, physical vapor deposition (PVD) processes, such as sputtering, and plasma processes, to name a few.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com