About: http://webisa.webdatacommons.org/148992647

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Of course, the gate insulating film is not limited to the silicon oxynitride film and another insulating film including silicon may be used
http://www.w3.org/ns/prov#wasQuotedFrom	google.com