About: http://webisa.webdatacommons.org/149028221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	f ha /2n-1 while masking a part of the substrate or proton exchanging regions and etching by a depth of hc /2n-1 the top surface of said proton exchanging regions to form n-th grooves; wherein n is an integer of 2 or more.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au