About: http://webisa.webdatacommons.org/149200885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the insulating substrate 10, the gate wiring 20, 21 and 22 is covered with a gate insulating film 30 with a thickness of 3500 to 4500 ??? which is made of an insulating material such as silicon nitride or silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com