About: http://webisa.webdatacommons.org/149206983

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In these SIMS depth profiles, higher Si+ signals are observed from oxides such as silica and glass regions than from the elemental Si film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com