About: http://webisa.webdatacommons.org/149226501

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the substrate is a planar semiconductor material having active electronic devices integrated in the surface thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au