About: http://webisa.webdatacommons.org/149265657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case of measuring the film thickness at a number of points, in particular, there is a tendency that the measured value changes during the measurement and it is difficult to evaluate the exact uniformity of the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com