About: http://webisa.webdatacommons.org/149275431

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the other hand, there is a trend toward not reducing or only slightly reducing the thickness of the insulating layer and thus the depth of the contact holes so that parasitic capacitances can be kept as low as possible.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr