About: http://webisa.webdatacommons.org/149347100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this method, the well-known semiconductor machining technique can be used to easily dispose heaters highly densely and an appropriate structure can be placed on the heaters to avoid the problems such as cross-talk, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au