| http://www.w3.org/ns/prov#value | - Aspects of the present disclosure are generally directed to methods for creating a metal or other electrically-conductive member extending from an air-backed cavity of a pMUT, through a substrate (i.e., SOI) layer disposed adjacent to the transducer device of the pMUT, and into electrically-conductive contact with the first/bottom electrode, such that the electrically-conductive member provides an
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