About: http://webisa.webdatacommons.org/149376124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In these drawings, features such as a shape and a dimension ratio in a thin silicon wafer are described differently from actual dimensions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com