About: http://webisa.webdatacommons.org/149397273

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An example of the pressure is 10???5 Pa or less, and preferably 10???6 Pa or less. [0133] This seal bonding step airtightly seals the abutment portions between the face plate 71, the support frame 72, and the rear plate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com