About: http://webisa.webdatacommons.org/149479156

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the series of substrate treatments including the treatment by the external treating apparatus may be repeated advantageously.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com