| http://www.w3.org/ns/prov#value | - Especially, in the case where the substrate is provided at such a position as to set a pressure in the second vacuum vessel lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate, flow state of the gas at the synthesis portion of the diamondlike thin film, pressure of the gas and plasma state can be made un
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