About: http://webisa.webdatacommons.org/149716965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Hafnium oxide/zirconium oxide/tin oxide layers formed by ALD may be processed at relatively low temperatures, such as 300??? C., and may be amorphous and possess smooth surfaces.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr