About: http://webisa.webdatacommons.org/149866010

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plasma etch has the advantage that it can be tailored to be more specific to etch desired materials and not overly etch into the interconnects, for example of aluminum or aluminum alloy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com