About: http://webisa.webdatacommons.org/149936296

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the present invention, further, it is possible to form a modified layer also on a region other than a surface which is directly irradiated with the SR beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es