About: http://webisa.webdatacommons.org/150027946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, as impurities such as the black film formed by the anode do not go into the plating solution supplied to the wafer, management of the plating solution will become easier.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com