About: http://webisa.webdatacommons.org/150069910

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, dry etch methods include C4F8 chemistry, or plasma etch including CHF3 and CF4, depending on the material and desired etching depth, as is well known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com