About: http://webisa.webdatacommons.org/15027355

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, a planarization process such as chemically mechanical polishing (CMP) is performed, rendering inner electrode 166 co-planar with pad layer 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com