About: http://webisa.webdatacommons.org/150507748

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A fourth aspect of the present invention is a method for defining multiple fine features in a resist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au