| http://www.w3.org/ns/prov#value | - It is also preferred that the discharge piping up to the reactor 22, i.e. an exhaust gas passage 25 from the outlet of the process chamber 12 and through the pumps 17 and 18 to the reactor 22, is provided with a heating equipment 26 and the like and is heated to a suitable temperature, for example about 150??? C. so as to prevent deposition from occurring in the passage.
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