About: http://webisa.webdatacommons.org/150974598

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still another aspect of the present invention is a method of polishing or planarizing the surface of a work piece comprising
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com