About: http://webisa.webdatacommons.org/151039531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	third system for its in-house nanomaterials research effort, targeting materials for new forms of conducting via structures and dielectric materials to support the continued scaling of semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	nanotech-now.com