About: http://webisa.webdatacommons.org/151048492

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At the distal portion of link 54, an end effector 56 is rotatably mounted and suitably configured for holding substrates such as semiconductor wafers and conveying these to or from the different stations 34.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com