About: http://webisa.webdatacommons.org/15109518

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case of sputtering, the gas pressure is preferably 5 Pa or lower, particularly 5???10???1 Pa or lower, for processing stability and deposit film denseness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au