About: http://webisa.webdatacommons.org/151250376

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such deposition typically takes place in an evacuated process chamber by way of any of a number of well know techniques, such as sputtering, evaporation and chemical vapor deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca