About: http://webisa.webdatacommons.org/151424677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As yet another example, a MEMS structure provides phase shifting in a circuit including a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com