PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In addition, it is to be understood that the present invention may be used with polishing pads which have been preconditioned, such as with concentric grooves as illustrated in U.S. Pat. No. 5,216,843.
http://www.w3.org/ns/prov#wasQuotedFrom
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