About: http://webisa.webdatacommons.org/151656429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, one of the first and second conditions includes high resolution, and another of the first and second conditions simulates an image of the reticle that will be printed on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk