About: http://webisa.webdatacommons.org/151676619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, the oxide films on the silicon wafers may be doped with such materials as phosphorous, arsenic, or boron.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com