About: http://webisa.webdatacommons.org/15185428

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This fluid, which in the preferred embodiment of the invention, is a liquid, forms a barrier, and prevents any coating which is evaporated from reaching the chamber wall.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com