About: http://webisa.webdatacommons.org/151873059

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One aspect of the present invention is a method of removing such residue from a surface after a planarization process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com