| http://www.w3.org/ns/prov#value | - Other insulating materials, including organic dielectric materials such as polyimide, polyamide, parylene, polymethylmethacrylate and other like organic materials, or inorganic materials such as Si3N4 or perovskite-type oxides or other like inorganic materials may be used with slight surface modification to produce hydroxyl functionality on the insulator surface.
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