About: http://webisa.webdatacommons.org/152242285

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is known that ion bombardment during film growth can modify the film composition, structure and other properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com