About: http://webisa.webdatacommons.org/152336478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Suitable techniques for deposition of a barrier film include chemical vapor deposition and physical vapor deposition including sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com