About: http://webisa.webdatacommons.org/152353046

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a heat resistant conductive material such as Ti, Cr, Nd, or the like is preferably used in combination, which improves planarity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au