About: http://webisa.webdatacommons.org/152390872

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, components other than silicon and nitrogen may be included in the silicon nitride layer used to form copper barrier layer 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es