About: http://webisa.webdatacommons.org/152522571

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such equipment enables processing and transfer of wafers between chambers without exposure to oxidizing or other contaminating conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es