| http://www.w3.org/ns/prov#value | - The lid assembly 120 generally comprises a lid plate 122, a ring heater 125, a manifold block 150, a showerhead 130, and high-speed valves 155A, 155B. Components of the lid assembly 120 are preferably formed from process-compatible materials, such as aluminum, aluminum nitride, stainless steel, graphite, silicon carbide, and the like.
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