About: http://webisa.webdatacommons.org/152784814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, layers 126, 124 and 108 are etched using a dry etching process such as plasma etching, reactive ion etching or ion milling.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com