About: http://webisa.webdatacommons.org/152849619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In semiconductor fabrication processes, wafers are transferred between stations, such as storage, queuing, processing and other work stations.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr