About: http://webisa.webdatacommons.org/152923264

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a preferred embodiment, opening 22 is filled with a low resistivity metal such as copper or copper alloy using electrochemical plating or CVD. In other embodiments, opening 22 may be filled with aluminum or aluminum alloy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es